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Arc discharge type ion plating device "SIA-400T"

For forming a surface hardened film Ideal as a small-quantity production machine / experimental machine.

[General Outline] 1.An arc discharge is generated on the surface of the evaporation source, and a thin film is formed through dissolution, evaporation, and ionization. 2.It is possible to form a TiN and TiAlN cured film. For more details, please contact us or download the catalog.

  • Other semiconductor manufacturing equipment
  • Arc discharge type ion plating device

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